微电子技术的发展规律及趋势。介绍了微电子技术随特征尺寸缩小而存在的几个关键发展层次，包括微细加工、互连技术、新器件结构及材料技术等。-The laws of the development of microelectronics technology and trends. Introduced with the feature size of microelectronic technology exists to narrow the development of several key l