随着微加工技术的发展和日益成熟 ,微型化光谱仪的研究得以快速发展。和传统的

微型光谱仪相比 ,基于调制原理的光谱仪具有高光通量、 高分辨率的性能优势 ,可广泛应用于生物、化学、 医学等许多领域中对微弱辐射信号的探测。介绍了几种类型的调制光谱仪的结构特点和关键技术 ,分析了设计与制作微型调制光谱仪过程中存在的一些关键问题与难点 ,并总结了该领域的研究进展和发展趋势。-　The mat uration of the optical micro2elect ro mechanical systems technology has

imp ul sed t he development of t he micro spect rometer . Compared to the t raditional micro

spect rometer , t he spect rometer based on modulation can be used in biological , chemical and

medical fields to detect t he faint signal s due to it s inherent advantages. An overview of t he

development s of t he micro spect rometer based on modulation is presented. The key p roblems in

designing and fabricating t he Fourier t ransform spect rometer ( F TS) are discussed , and t he

progresses made worldwide in t his field are al so presented.