精密工作台的光栅位移测量和控制系统 精密工作台的光栅定位测量和控制系统的设计 介绍了 国内外现状和光栅检测的历史。当今采用的原理和总体方案，放大整形、5倍频电阻链细分并联4细分辨向电路，24位可逆计数器

-Grating displacement precision stage control system for precision measurements and positioning table of the raster measurement, and control system introduced in this paper the historical status and grating detection. The principle used today and the overall program, to enlarge Plastic, 5 sub-parallel multiplier resistor chain circuit 4 subdivision, 24-bit reversible counter