文件名称:COUPL ED MEMRISTOR DEVICES TO ENABLE FEEDBACK CONTROL AND SENSING OF MICRO/NANOEI ECTROMECHANICAI」 ACTUATOR AND SENSORS
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A MEMS apparatus with dynamic displacement control
includes a MEMS parallel plate capacitor integrated with
one or more memristors in a series configuration wherein a
displacement is observable as a function of memristance,
such that an upper electrode position is capable of being
interpreted in a form of a resistance rather than a capaci-
tance. The current is limited by said MEMS parallel plate
capacitor restricting a change in the resistance of the mem-
ristor(s). The memristor(s) can be employed in some
embodiments a sensor element to improve a MEMS opera-
tion range.
includes a MEMS parallel plate capacitor integrated with
one or more memristors in a series configuration wherein a
displacement is observable as a function of memristance,
such that an upper electrode position is capable of being
interpreted in a form of a resistance rather than a capaci-
tance. The current is limited by said MEMS parallel plate
capacitor restricting a change in the resistance of the mem-
ristor(s). The memristor(s) can be employed in some
embodiments a sensor element to improve a MEMS opera-
tion range.
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压缩包 : 专利-2019- Coupled memristor devices to enable feedback control and sensing of micro nanoelectromechan 列表
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